Connecting the German ALD Community with Martin Knaut ALD Stories Ep. 31
Episode 31 features German ALD professor, Dr. Martin Knaut. Martin is the chair for the Institute of Semiconductor and Microsystems Technology at TU Dresden and the atomic layer processing group leader. He is also a founding member of the Atomic Layer Process Innovation Network, or ALPIN, organizer of the annual ALD for Industry event, and runs a small in situ tool development company, called ALS Metrology. With a long career working with ALD in Dresden, at the likes of Infineon and Qimonda, Martin has witnessed the ebbs and flows of the semiconductor industry in the state of Saxony.
Martin and Tyler discuss the goal of the Silicon Saxony organization, how we can better recruit students in microelectronics, and why he originally started the Atomic Layer Process Innovation Network. They also discuss his company, ALS Metrology, the importance of using in situ monitoring for process development, and his work on flash-enhanced ALD.
In this episode:
00:00 Intro
01:48 Martin’s background & semiconductors in Dresden
10:00 Recruiting issues for microelectronics
17:29 ALPIN & ALD for Industry events
29:34 ALS Metrology
34:57 Importance of in situ monitoring
41:59 Flash-Enhanced ALD
53:55 Concluding remarks
20 Dec 2023
SnS ALD and Ultrathin Solar Cells with Carl Hägglund – ALD Stories Ep. 30
In this episode, Tyler is joined by Professor Carl Hägglund from Uppsala University. They discuss Carl’s motivations for pursuing ultrathin solar cells, how he learned ALD at Stanford in Stacey Bent’s lab, and an unlikely research connection through his child’s school. They also talk about why ALD is useful for plasmonic solar cells, optimization of SnS ALD and his planned path towards a fully realized ultrathin photovoltaic.
00:00 Introduction
01:45 Motivation for fabricating plasmonic solar cells
09:58 Learning ALD at Stanford
22:46 Optimizing SnS ALD process
30:33 Path towards an ultrathin solar cell
30 Nov 2023
Introducing ALD to the Semiconductor Industry with Suvi Haukka – ALD Stories Ep. 29
Dr. Suvi Haukka, former executive technologist at ASM, ASM Fellow and ALD Innovator Awardee, joins Tyler for Episode 29. Suvi began her ALD career at Microchemistry in Finland working on atomic layer epitaxy on catalysts for under the direction of ALD technology inventor, Tuomo Suntola. She continued with Microchemistry as head of the thin film development group before spending most of her time teaching the world’s biggest semiconductor companies, like Intel and Samsung, about ALD. Suvi is one of the integral people in introducing ALD to the semiconductor industry in the 2000s.
Suvi and Tyler discuss how she started working with ALD, what it was like to do a PhD with Tuomo Suntola, and how the make up of Microchemistry changed over the years. We also discuss the circumstances surrounding the ASM acquisition, how development changed under new leadership, and how it felt pitching ALD to the semiconductor industry.
In this episode:
00:32 Introduction to Microchemistry
06:01 Doing a PhD with Tuomo Suntola
19:00 Visiting semiconductor companies
25:37 Post-ASM acquisition
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